Tantalum tris(diethylamido)-tert-butylimide, 99.99% (metals basis)
化学性质
应用
Tantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.
注释
参考文献
George, S. M.; Yoon, B. Molecular Layer Deposition of Organic and Hybrid Organic-Inorganic Polymers. Material Matters. 2008, 3, (2), 34-37.
Rushworth, S. High purity metalorganic precursors for CPV device fabrication. Material Matters. 1994, 5 (4), 94.
GHS危险和防护声明
危险说明（欧盟）:H261-H314
In contact with water releases flammable gas. Causes severe skin burns and eye damage.
防范说明:P264b-P271-P280-P301+P330+P331-P304+P340-P305+P351+P338-P310-P335+P334-P363-P370+P378r-P402+P404-P501c
Wash face, hands and any exposed skin thoroughly after handling Use only outdoors or in a well-ventilated area. Wear protective gloves/protective clothing/eye protection/face protection. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. IF INHALED: Remove to fresh air and keep at rest in a position comfortable for breathing. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Immediately call a POISON CENTER or doctor/physician. Brush off loose particles from skin. Immerse in cool water/wrap in wet bandages. Wash contaminated clothing before reuse. In case of fire: Store in a dry place. Store in a closed container. Dispose of contents/ container to an approved waste disposal plant
其他参考资料
文件
产品 SDS
质量分析报告(COA)
